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Optotherm

MW640-15

MW640-15는 Optotherm의 최고 감도급 중파장 적외선(MWIR) 카메라로, 
Lock-in Thermography 기반의 전면·후면 반도체 결함 분석에 최적화된 시스템입니다.
최대 2 µm 공간 분해능을 구현하여 SiC 등 다양한 윈도우 소재를 통과하는
미세 열 이상 신호까지 정밀하게 감지합니다.

640x512 pixels

Array Size 

15 µm

Detector Pitch

3.6-4.9 µm

Sensor Wavelength

< 25 mK

NETD

100 Hz

Frame Rate

2 µm

(with 2 Micron Lens)

Pixel Resolution

Keyfeatures & benefits


High-Resolution Mid-Wave Infrared (MWIR) Thermography System for Semiconductor Analysis



The MW640-15 is a high-performance, cooled mid-wave infrared (MWIR) imaging system specialized for Lock-in Thermography (LIT) analysis.
It enables highly sensitive defect detection in semiconductor devices using phase-based thermal imaging.
SEKOA provides this system as part of Optotherm's advanced LIT analysis solutions to customers in Korea and worldwide.




01. High-Sensitivity Lock-in Thermography

The MW640-15 is a cooled MWIR camera optimized for Lock-in Thermography (LIT). It supports up to 100 Hz frame rates and allows stable phase-based thermal analysis at test frequencies up to 25 Hz. This reduces thermal diffusion and improves localization accuracy. It delivers <25 mK thermal sensitivity and 2 µm spatial resolution, making it ideal for backside imaging, stacked die, and SiC transparency analysis.


02. Advanced Thermal Analysis with Thermalyze

Thermalyze software enables a wide range of analysis tools beyond LIT, including image overlay and subtraction, temperature graphing, histogram analysis, regional temperature statistics, and thermal profile tracking. It supports emissivity table-based correction, scripted source meter control, and automated test sequencing.


03. Flexible Stage & Probing Options

MW640-15 supports precise positioning of wafers, packages, and boards using motorized or manual XYZ stages. Optional accessories include a thermoelectric stage with controller, device probing platforms, and needle probers. The system provides high-resolution thermal imaging in a non-destructive analysis environment.

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